Research about Ultrasonic Motor and Ultra Precise-positioning Surface Acoustic Motor
We are developing the high precious positioning stage using friction drive with the ultrasonic motor first in the world. It is the 1/2 smaller and the 3 times higher precision than former. The key technology of this success is the wear control at the part of friction drive. In this research, we apply ceramics having superior character of wear-resistant at the friction part and develop the design of software to drive and machine to control the wear.
Current study topics (2007-present).
- Ultra-high-speed precision positioning stage using V-shape ultrasonic motors (M2-Murakami)
- Durability improvement of surface acoustic wave motor (M2 Chiba)